Glossary

Defect clustering

Beginner

Flaws on a wafer tend to bunch together instead of landing evenly, so some chips get several and others none.

Novice

Killer defects are not spread perfectly at random: they gather in some regions, wafers or lots. For a given average defect density, clustering leaves more dies defect-free than a purely random spread would.

Expert

Modeled by letting the defect density itself vary (compound Poisson). A gamma distribution gives the negative binomial model with cluster parameter α\alpha; small α\alpha means strong clustering, and α\alpha of about 10 or more behaves like Poisson.

Explained in Making them (Transistors).

See also: Die yield, Defect density (D₀).

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