Glossary

Deposition

Beginner

Adding a very thin, even layer of material over the whole wafer, like a coat of paint only a few atoms to a few hundred atoms thick.

Novice

Growing or laying down a film: chemical vapor deposition (CVD) reacts gases on the wafer; physical vapor deposition (sputtering) knocks atoms off a target, mostly for metals; electroplating fills copper; atomic layer deposition builds a film one atomic layer at a time.

Expert

Chosen by conformality, temperature and film quality. CVD and ALD coat sidewalls; sputtering is more line-of-sight. Spacers, liners and gate dielectrics depend on conformal films of controlled thickness.

Explained in Making them (Transistors).

See also: Atomic layer deposition (ALD).

All 896 terms →