Glossary

Self-aligned gate

Beginner

Using a switch’s gate, its on/off control, as the stencil for its two ends, so they always line up perfectly.

Novice

The gate is patterned first and then blocks the source/drain implant beneath it, so the source and drain end exactly at the gate edges without a separate alignment.

Expert

Removes the gate-overlap margin that misalignment once forced, cutting parasitic overlap capacitance. Sidewall spacers then offset the heavy implant from the channel; extension implants done before the spacers set the overlap that remains.

Explained in Making them (Transistors).

See also: Sidewall spacer, Ion implantation.

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