Glossary

Middle of line (MOL)

Beginner

The small set of steps that connect the finished switches to the wiring above them.

Novice

The contacts and local connections that join transistor sources, drains and gates to the first metal layer. Once a few simple steps, it became its own module as transistors shrank.

Expert

In ASAP7 it is three layers: gate and source/drain local interconnect (LIG, LISD) and V0 up to M1, all printed with EUV.

Explained in Making them (Transistors).

See also: FEOL and BEOL, Silicide (salicide).

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